Cited 8 time in webofscience Cited 8 time in scopus

Three-Dimensional Silicon Electronic Systems Fabricated by Compressive Buckling Process

Title
Three-Dimensional Silicon Electronic Systems Fabricated by Compressive Buckling Process
Authors
Kim, Bong HoonLee, JungyupWon, Sang MinXie, ZhaoqianChang, Jan-KaiYu, YongjoonCho, Youn KyoungJang, HokyungJeong, Ji YoonLee, YechanRyu,ArinKim, Do HoonLee, Kun HyuckLee, Jong YoonLiu, FeiWang, XuejuHuo, QingzeMin, SeunghwanWu, DiJi, BowenBanks, AnthonyKim, JeonghyunOh, NuriJin, Hyeong MinHan, SeungyongKang, DaeshikLee, Chi HwanSong, Young MinZhang, YihuiHuang, YonggangJang, Kyung-InRogers, John A.
DGIST Authors
Jang, Kyung-In
Issue Date
2018-05
Citation
ACS Nano, 12(5), 4164-4171
Type
Article
Article Type
Article
Keywords
DiodesMathematical transformationsSilicon wafersGeometric transformationsMicro-scale componentsSilicon diodesSilicon nanomembranesSilicon transistorsThree-dimensional layoutTwo-dimensional layoutTwo-dimensional structuresMOSFET devices
ISSN
1936-0851
Abstract
Recently developed approaches in deterministic assembly allow for controlled, geometric transformation of two-dimensional structures into complex, engineered three-dimensional layouts. Attractive features include applicability to wide ranging layout designs and dimensions along with the capacity to integrate planar thin film materials and device layouts. The work reported here establishes further capabilities for directly embedding high-performance electronic devices into the resultant 3D constructs based on silicon nanomembranes (Si NMs) as the active materials in custom devices or microscale components released from commercial wafer sources. Systematic experimental studies and theoretical analysis illustrate the key ideas through varied 3D architectures, from interconnected bridges and coils to extended chiral structures, each of which embed n-channel Si NM MOSFETs (nMOS), Si NM diodes, and p-channel silicon MOSFETs (pMOS). Examples in stretchable/deformable systems highlight additional features of these platforms. These strategies are immediately applicable to other wide-ranging classes of materials and device technologies that can be rendered in two-dimensional layouts, from systems for energy storage, to photovoltaics, optoelectronics, and others. © 2018 American Chemical Society.
URI
http://hdl.handle.net/20.500.11750/6586
DOI
10.1021/acsnano.8b00180
Publisher
American Chemical Society
Related Researcher
  • Author Jang, Kyung-In Bio-integrated Electronics Lab
  • Research Interests Extreme mechanics; Stand-alone electronics; Heterogeneous materials; Biocompatible interfaces
Files:
There are no files associated with this item.
Collection:
Department of Robotics EngineeringBio-integrated Electronics Lab1. Journal Articles


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