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Issue Date	Title Author(s) Journal	View
2014-07-01	The effects of nitrogen incorporation on the properties of atomic layer deposited Ru thin films as a direct-plateable diffusion barrier for Cu interconnect Mun, Ki-Yeung ; Hong, Tae Eun ; Cheon, Taehoon ; Jang, Yujin ; Lim, Byoung-Yong ; Kim, Sunjung ; Kim, Soo-Hyun Thin Solid Films, v.562, pp.118 - 125, 2014-07-01	498
2014-10-15	Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition Park, Ji-Yoon ; Yeo, Seungmin ; Cheon, Taehoon ; Kim, Soo-Hyun ; Kim, Min-Kyu ; Kim, Hyungjun ; Hong, Tae Eun ; Lee, Do-Joong Journal of Alloys and Compounds, v.610, pp.529 - 539, 2014-10-15	594
2013-04	Growth of Highly Conformal TiCx Films Using Atomic Layer Deposition Technique Hong, Tae Eun ; Choi, Sang-Kyung ; Kim, Soo-Hyun ; Cheon, Taehoon Journal of the American Ceramic Society, v.96, no.4, pp.1060 - 1062, 2013-04	474
2013-01	Atomic Layer Deposition of Ru Thin Films Using a Ru(0) Metallorganic Precursor and O-2 Hong, Tae Eun ; Choi, Sang-Hyeok ; Yeo, Seungmin ; Park, Ji-Yoon ; Kim, Soo-Hyun ; Cheon, Taehoon ; Kim, Hoon ; Kim, Min-Kyu ; Kim, Hyungjun ECS Journal of Solid State Science and Technology, v.2, no.3, pp.P47 - P53, 2013-01	429
2018-03	Cobalt titanium nitride amorphous metal alloys by atomic layer deposition Nam, Taewook ; Lee, Chang Wan ; Cheon, Taehoon ; Lee, Woo Jae ; Kim, Soo-Hyun ; Kwon, Se-Hun ; Lee, Han-Bo-Ram ; Kim, Hyungjun Journal of Alloys and Compounds, v.737, pp.684 - 692, 2018-03	270
2020-02	Rate performance enhancement of lithium-ion battery using precise thickness-controllable-carbon-coated titanium dioxide nanowire array electrode via atomic layer deposition Choi, Taejin ; Kim, Seong Dae ; Yeo, Seungmin ; Cheon, Taehoon ; Kim, Soo-Hyun ; Ahn, Jong-Hyun ; Kim, Hyungjun Electrochimica Acta, v.334, pp.135596, 2020-02	521
2018-03	Detailed Visualization of Phase Evolution during Rapid Formation of Cu(InGa)Se-2 Photovoltaic Absorber from Mo/CuGa/In/Se Precursors Koo, Jaseok ; Kim, Sam Mi ; Cheon, Tae Hoon ; Kim, Soo-Hyun ; Kim, Woo Kyoung Scientific Reports, v.8, 2018-03	432
2021-07-06	Atomic layer deposition of RuO2 using a new metalorganic precursor as a diffusion barrier for Ru interconnect Kim, Youn-Hye ; Kotsugi, Yohei ; Cheon, Taehoon ; Ramesh, Rahul ; Kim, Soo-Hyun 24th Annual IEEE International Interconnect Technology Conference, IITC 2021, 2021-07-06	11
2023-11	Layer Engineered MXene Empowered Wearable Pressure Sensors for Non-Invasive Vital Human–Machine Interfacing Healthcare Monitoring Mohapatra, Debananda ; Byun, Jeong Eun ; Ansari, Mohd Zahid ; Kim, Haekyoung ; Cheon, Taehoon ; Jang, Jongmoon ; Cho, Young-Rae ; Lee, Jung Woo ; Kim, Soo-Hyun Advanced Materials Technologies, v.8, no.24, 2023-11	25
2023-05	Preparation of wafer-scale highly conformalamorphous hafnium dioxide thin films by atomic layer deposition using a thermally stable boratabenzene ligand-containing hafnium precursor Ansari, Mohd Zahid ; Janicek, Petr ; Park, Ye Jin ; NamGung, Sook ; Cho, Bo Yeon ; Nandi, Dip K. ; Jang, Yujin ; Bae, Jong-Seong ; Hong, Tae Eun ; Cheon, Taehoon ; et al Applied Surface Science, v.620, 2023-05	47

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